Electromechanical System Design & Precision Motion Control
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Management Team
 
 

Dr. Mark E. Williams, President


Dr. Williams has worked in precision motion control specifically for the photolithography industry since 1996. He also has experience directing the design of a photolithography stepper architecture including stages, active vibration isolation, structures, and metrology. As a doctoral student at the Massachusetts Institute of Technology, he performed work on the use of linear magnetic bearings for a six-degree-of-freedom lithography stage. In addition, Dr. Williams has since developed stages for use in a high vacuum, linear guide stages, air-bearing stages, and voice-coil flexural stages. Other designs have included six-degree-of-freedom active vibration isolation systems and dynamic testing of machine structures. Dr. Williams currently has numerous patents in motion control, electromagnetics, and vibration isolation. Dr. Williams holds a doctorate in Precision Machine Design and Mechatronics from the Massachusetts Institute of Technology. He is a member of the IEEE, ASME, and ASPE.

 

Dr. Samir Nayfeh, Chief Technology Officer

Before joining Equilibria, Samir was an Assistant Professor of Mechanical Engineering at MIT from the time he received his Ph.D. in 1998 at MIT in the Laboratory for Manufacturing and Productivity.   His research at MIT focused on the design of precision machines, advanced structures, vibration, and control. He has extensive experience as an industrial consultant and as a researcher in the design, fabrication, and testing of high-performance machine systems. He has supervised major funded research programs on the design of bearing systems, fabrication of three-dimensional woven structures, design of collet and spindle systems, and vibration control in precision assemblies. In addition to teaching graduate and undergraduate courses on machine design and control at MIT, he co-taught an industrial course entitled "Precision Machine Design'' offered by the Society for Manufacturing Engineers.

 

Mark Puzerewski, Director of Global Field Services and Training

Mark brings to our organization over 15 years of global customer support management experience in the semiconductor industry through roles in engineering, sales/marketing, and as an entrepreneur. He has focused a large percentage of his career in the area of microlithography, but has been involved with nearly all stages of microelectronic IC fabrication. Through his work experience, Mark has been a technical and organizational leader on numerous fab startup projects on both the vendor and customer side of the operation. He holds BS and MS degrees in Electrical Engineering from the University of North Carolina at Charlotte. He has published multiple technical papers in applied physics, microlithography, and automated process control and has been an invited speaker at international scientific conferences in the US and abroad.

 

Deborah Williams, Director of Marketing

Deborah is a results-driven manager bringing over 15 years of industry and management experience in marketing, product management, and business development to her role as Director of Marketing. Deborah is responsible for all aspects of Equilibria's operations, leading functional areas such as Marketing, Sales and Services. Deborah is a visionary business development leader providing strategic direction and is an innovative program manager adept at product development, partner strategy, and multi-level marketing campaigns. She has extensive experience as a presenter and product representative for print and video campaigns. Deborah is a MBA graduate of Southern New Hampshire University and holds a B.S. in Business Management.

 

Forrest Thornton, Director of Manufacturing and Quality

 

Mr. Thornton brings over 30 years of quality and manufacturing expertise to Equilibria. Forrest is a manufacturing and quality leader with an impressive record of achievements with organizations recognized for high quality standards, such as Anheuser-Busch, AMCOR PET Packaging, and Teleflex Medical. Forrest is a Senior ASQ member, CQAM and Supplier Auditor and previously, a State of NH Baldrige Examiner. In addition, he has published several articles and has been a featured speaker at ASQ conferences. Forrest holds an MBA from Rivier College, in addition to B.S. degrees in Biology, Chemistry, and Education.

 

Steve Tracy, Mechanical Engineering Manager

Steve brings to our organization over 20 years of precision mechanics and optomechanical experience.   Throughout his career Steve has been involved in leading edge microlithography equipment design and his expererience includes design positions at GCA, Ultratech Stepper, ISI Lithography, Hewlett Packard, and Phillips. Steve was instrumental in the prototyping of many innovative lithography systems such as maglev stages, wafer and reticle handling robotics, lens designs and numerous other precision motion control subsystems. Steve is a graduate of Northeastern University in Mechanical Engineering.

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